High current density ion beam obtained by a transition to a highly focused state in extremely low-energy region-Reference-Cited by-同舟云学术

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High current density ion beam obtained by a transition to a highly focused state in extremely low-energy region

Published:2015-11 Issue:11 Volume:86 Page:113303
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Rev. Sci. Instrum.

Author:

Hirano Y.¹²,Kiyama S.¹,Fujiwara Y.¹³,Koguchi H.¹,Sakakita H.¹³

Affiliation:

1. Innovative Plasma Processing Group, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan

2. College of Science and Technologies, Nihon University, Chiyodaku, Tokyo 101-0897, Japan

3. Department of Engineering Mechanics and Energy, University of Tsukuba, Ibaraki 305-8577, Japan

Publisher

AIP Publishing

Subject

Instrumentation

Reference29 articles.

1. Effects of Ion Energy Control on Production of Nitrogen–C60Compounds by Ion Implantation

2. Characterization of Thick Amorphous Carbon Films Formed by Pulse Bias Filtered Cathodic Vacuum Arc

3. The sp3 bond fraction in carbon films prepared by mass-separated ion beam deposition

4. Physics of ion beam plasma and problems of intensive ion beam transportation (invited)a)

5. Extraction of space-charge-dominated ion beams from an ECR ion source: Theory and simulation

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Measurements of beam current density and space potential in a highly focused ion beam of extremely low energy;Plasma Sources Science and Technology;2019-06-17

2. Effects of a dielectric material in an ion source on the ion beam current density and ion beam energy;Review of Scientific Instruments;2016-02

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