Molecular dynamics study on Ar ion bombardment effects in amorphous SiO2 deposition processes
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2401651
Reference22 articles.
1. Topography Evolution of Dielectric Thin Films on Grating Surfaces in Oblique Deposition by Multiple Sources (ODMS)
2. Numerical Analysis of Incident Angle Effects in Reactive Sputtering Deposition of Amorphous SiO2
3. A metal-coated etched diffraction demultiplexer with a low polarization dependent loss
4. Design and properties analysis of multi-layer dielectric used in pulse compressor gratings
5. Blazed diffraction gratings fabricated using X-ray lithography: fabrication, modeling and simulation
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