Using metal-insulator-semiconductor structures to investigate dielectrics charging in capacitive microelectromechanical switches
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2970043
Reference12 articles.
1. RF MEMS from a device perspective
2. RF MEMS switches and switch circuits
3. Measurements of charging in capacitive microelectromechanical switches
4. Lifetime characterization of capacitive RF MEMS switches
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