Boltzmann analysis of electron swarm parameters in CF4 using independently assessed electron-collision cross sections
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371258
Reference24 articles.
1. Electron Interactions with CF4
2. Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion–neutral reactive collisions
3. Electron Impact Cross Section Data for Carbon Tetrafluoride
4. A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. II: Cl4, SiH4, and CH4
5. Electron swarm parameters in carbon tetrafluoride
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