Low‐loss AlGaAs optical rectangular waveguides at 830 nm

Author:

Hibbs‐Brenner M. K.,Sullivan C. T.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. III-V semiconductor waveguides for photonic functionality at 780 nm;Integrated Optics: Devices, Materials, and Technologies XVIII;2014-03-08

2. Dielectric materials in optical waveguide aplications;Interlayer Dielectrics for Semiconductor Technologies;2003

3. Investigation of optical losses in photoelastic and ridge waveguides in GaAs-AlGaAs heterostructures;IEEE Photonics Technology Letters;1996-06

4. Etching of GaAs/AlGaAs rib waveguide structures using BCl3/Cl2/N2/Ar electron cyclotron resonance;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-09

5. Technology and devices for hybrid and monolithically integrated optical sensors;Sensors and Actuators A: Physical;1994-04

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