Affiliation:
1. The Institute of Technological Sciences, Wuhan University, Wuhan, Hubei Province 430072, People's Republic of China
Abstract
High-performance Lamb wave devices have a vast application prospect in modern wireless communication systems. This paper proposes a method of spurious mode suppression by reducing the overlap length of electrodes according to modal shapes. The AlN/Al0.8Sc0.2N composite film is used to achieve a trade-off between electromechanical coupling coefficient [Formula: see text] and Q factor. The finite-element analysis (FEA) is employed to study the performance of the lowest-order symmetric mode (S0) Lamb wave resonators (LWRs), and the FEA result shows a spurious mode in the impedance response. According to the results of modal shape analysis, the typical LWR, the LWR with the circle-shaped arrangement of electrodes, the LWR with the circle-shaped apodization, and the LWR with the arc-shaped apodization are fabricated to suppress the spurious mode and investigate the performance of the LWRs. The measurement results show that the spurious mode is effectively suppressed over a wide frequency range (1.9–2.2 GHz) by the three designed electrode configurations. The LWR with the circle-shaped apodization working at 2.023 GHz has a Qp factor of 955, a moderate [Formula: see text] of 2.97%, a figure-of-merit ([Formula: see text]) of 28.4, and a large value of [Formula: see text] (5.773 × 1010). Utilizing modal shapes to design the electrode configuration of LWRs can suppress spurious modes without significant performance deterioration.
Funder
Science and Technology Program of Hubei Province
Subject
General Physics and Astronomy
Cited by
9 articles.
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