Collisionless electron heating in periodic arrays of inductively coupled plasmas
Author:
Affiliation:
1. Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany
2. Department of Applied Physics, Technical University-Sofia, BG-1000 Sofia, Bulgaria
Funder
Alexander von Humboldt-Stiftung (Humboldt Foundation)
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4903880
Reference41 articles.
1. Physics of Radio-Frequency Plasmas
2. Non-local ponderomotive force in finite temperature inductive plasmas
3. Plasma phenomena in inductive discharges
4. From Fermi acceleration to collisionless discharge heating
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2. Operation of the inductively coupled array (INCA) discharge as a para-array;Journal of Physics D: Applied Physics;2021-07-07
3. Numerical modeling of plasma sources with a periodic structure;PROCEEDINGS OF THE 45TH INTERNATIONAL CONFERENCE ON APPLICATION OF MATHEMATICS IN ENGINEERING AND ECONOMICS (AMEE’19);2019
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