Arrhenius-like behavior in plasma reactions
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119807
Reference11 articles.
1. The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges
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3. Kinetics of Power Deposition and Silane Dissociation in Radio‐Frequency Discharges
4. Measurement of electron energy distribution in low-pressure RF discharges
5. Boltzmann equation analysis of electron swarm behaviour in monosilane
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