1. Department of Electromechanical Measuring and Controlling, School of Mechanical Engineering, Southwest Jiaotong University, Chengdu 610031, China
2. State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, China
3. Key Laboratory of Air-driven Equipment Technology of Zhejiang Province, Quzhou University, Quzhou 324000, China
4. School of Mechanical Engineering, Sichuan University, Chengdu 610065, China
5. School of Mechanical Science and Engineering, State Key Laboratory of Digital Manufacturing Equipments and Technology, Huazhong University of Science and Technology, Wuhan 430070, China