Exposure characteristics of cobalt fluoride (CoF2) self-developing electron-beam resist on sub-100 nm scale
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1487914
Reference22 articles.
1. Room Temperature Magnetic Quantum Cellular Automata
2. Magnetic nanoparticles
3. Magnetic nanostructures produced by electron beam patterning of direct write transition metal fluoride resists
4. Quantum mirages formed by coherent projection of electronic structure
5. Inducing All Steps of a Chemical Reaction with the Scanning Tunneling Microscope Tip: Towards Single Molecule Engineering
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3. Chirality Affecting Reaction Dynamics of HgS Nanostructures Simultaneously Visualized in Real and Reciprocal Space;ACS Nano;2021-09-23
4. In-situ irradiation of cerium precursors in TEM to study nanocrystal formation;Journal of Physics: Conference Series;2017-09
5. Fabrication of cobalt trifluoride (CoF3) phase from metallic cobalt by XeF2-assisted Focused Electron Beam Induced Processing;Microelectronic Engineering;2014-08
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