The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma: A study by a nonlinear global model-Reference-Cited by-同舟云学术

The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma: A study by a nonlinear global model

Author:

Saikia P.¹^ORCID,Bhuyan H.¹^ORCID,Escalona M.¹,Favre M.¹,Bora B.²³,Kakati M.⁴,Wyndham E.¹,Rawat R. S.⁵^ORCID,Schulze J.⁶⁷

Affiliation:

1. Institute of Physics, Pontificia Universidad Católica de Chile, Av. Vicuña Mackenna 4860, Santiago, Chile

2. Comisión Chilena de Energía Nuclear, Santiago, Chile

3. Departamento de Ciencias Físicas, Universidad Andrés Bello, Republica 220, Santiago, Chile

4. Centre of Plasma Physics, Institute for Plasma Research, Sonapur, India

5. National Institute of Education, Nanyang Technological University, Singapore

6. Department of Electrical Engineering, Ruhr University Bochum, Bochum, Germany

7. Department of Physics, West Virginia University, Morgantown, West Virginia 26506, USA

Funder

Fondo Nacional de Desarrollo Científico y Tecnológico

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

Reference46 articles.

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献