Invited Review Article: Measurement uncertainty of linear phase-stepping algorithms
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3603452
Reference84 articles.
1. Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses
2. Digital wave-front measuring interferometry: some systematic error sources
3. Fourier description of digital phase-measuring interferometry
4. New compensating four-phase algorithm for phase-shift interferometry
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