Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3504652
Reference54 articles.
1. Towards nondestructive carrier depth profiling
2. Advances in optical carrier profiling through high-frequency modulated optical reflectance
3. Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
4. Extracting active dopant profile information from carrier illumination power curves
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