A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma-Reference-Cited by-同舟云学术

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A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma

Published:2015-12 Issue:12 Volume:22 Page:123504
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Kim Young-Cheol¹,Kim Hyun-Jun²,Lee Hyo-Chang²,Chung Chin-Wook²

Affiliation:

1. Department of Nanoscale Semiconductor Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 133-791, South Korea

2. Department of Electrical Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 133-791, South Korea

Funder

Converging Research Center Program

National R&D Program

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4936951

Reference29 articles.

1. How Langmuir Probes Work

2. A novel electrostatic probe method for ion flux measurements

3. Plasma–surface interactions

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of parallel resonance on the electron energy distribution function in a 60 MHz capacitively coupled plasma;Plasma Science and Technology;2023-02-08

2. Effects of external circuit on current and voltage waveforms in atmospheric pressure RF symmetrical alpha-mode discharges;Physics of Plasmas;2021-10

3. Response to “Comment on ‘A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma’” [Phys. Plasmas 28, 064701 (2021)];Physics of Plasmas;2021-06

4. Comment on “A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma” [Phys. Plasmas 22, 123504 (2015)];Physics of Plasmas;2021-06

5. Spectroscopic Diagnosis of Atmosphere High Frequency Air Plasma Electron Temperature;SPECTROSC SPECT ANAL;2017

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