Uniform beam profiles of 5 cm convex gridded ion beam source
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1146475
Reference6 articles.
1. Ion beam etching of InGaAs, InP, GaAs, Si, and Ge
2. Application of reactive-ion-beam etching to recessed-gate GaAs metal–semiconductor field-effect transistors
3. Ion-based methods for optical thin film deposition
4. Ion Beam Micromachining of Integrated Optics Components
5. Broad‐beam ion sources: Present status and future directions
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3. Initial Growth Characteristics of Gold Thin Films by a Nozzle Beam and Ion-Assisted Deposition;Japanese Journal of Applied Physics;2003-12-19
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