Impact of Si substrate orientations on electrical properties of crystalline Gd2O3 thin films for high-K application
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2360209
Reference14 articles.
1. Silicon Surfaces and Formation of Interfaces
2. Transport Properties of Electrons in Inverted Silicon Surfaces
3. Effect of the Crystal Orientation upon Electron Mobility at the Si-SiO2Interface
4. INTERFACE FORMATION DURING EPITAXIAL GROWTH OF BINARY METAL OXIDES ON SILICON
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