Design of semiconductor surface pits for fabrication of regular arrays of quantum dots and nanorings
Author:
Affiliation:
1. Department of Chemical Engineering, University of Massachusetts Amherst, Amherst, Massachusetts 01003-9303, USA
Funder
U.S. Department of Energy
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5064807
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1. Pit rim decomposition into multiple quantum dots on surfaces of epitaxial thin films grown on pit-patterned substrates;Journal of Applied Physics;2022-08-28
2. Nanoscale wafer patterning using SPM induced local anodic oxidation in InP substrates;Semiconductor Science and Technology;2021-12-15
3. Fabrication of Ordered Arrays of Quantum Dot Molecules Based on the Design of Pyramidal Pit Patterns on Semiconductor Surfaces;Industrial & Engineering Chemistry Research;2019-11-08
4. On the formation of multiple quantum dots inside elongated pits on semiconductor films deposited epitaxially on pit-patterned substrates;Materials Research Express;2019-06-12
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