Plasma characteristics in a solenoidal inductive/capacitive discharge under a weak dc magnetic field
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2800852
Reference18 articles.
1. From Fermi acceleration to collisionless discharge heating
2. Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge
3. Ion bombardment energy distributions in a radio frequency induction plasma
4. Optical ion energy measurements in a radio‐frequency‐induction plasma source
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1. Improvement of photoresist etching by impedance control of a bias electrode in an inductive discharge;Plasma Sources Science and Technology;2023-07-01
2. Comparisons of the Characteristic on the Mode Transition in an Inductively Coupled Discharge by Exciting Coil Change;IEEE Transactions on Plasma Science;2017-03
3. Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmas;Physics of Plasmas;2016-11
4. Comparison of theBfield dependency of plasma parameters of a weakly magnetized inductive and Helicon hydrogen discharge;Plasma Sources Science and Technology;2016-04-12
5. Transition of electron kinetics in weakly magnetized inductively coupled plasmas;Physics of Plasmas;2013-10
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