Crystalline disorder reduction and defect‐type change in silicon on sapphire films by silicon implantation and subsequent thermal annealing
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91318
Reference10 articles.
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5. Dechanneling of fast particles by lattice defects
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3. Hydrogenation effect on silicon on sapphire grown by rapid thermal chemical vapor deposition;Physica E: Low-dimensional Systems and Nanostructures;2003-03
4. Bipolar Transistors on Si / MgO · Al2 O 3 / Si;Journal of The Electrochemical Society;1992-10-01
5. Exploiting Si/CoSi2/Si heterostructures grown by mesotaxy;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-07
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