In situmetrology for adaptive x-ray optics with an absolute distance measuring sensor array
Author:
Affiliation:
1. Zygo Corporation, 21 Laurel Brook Road, Middlefield, Connecticut 06455, USA
2. Brookhaven National Laboratory—NSLS II, Upton, New York 11973, USA
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5060954
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