Shockwave-induced deformation of organic particles during laser shockwave cleaning-Reference-Cited by-同舟云学术

Shockwave-induced deformation of organic particles during laser shockwave cleaning

Published:2013-08-14 Issue:6 Volume:114 Page:063104
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Hoon Kim Tae,Cho Hanchul,Busnaina Ahmed,Park Jin-Goo,Kim Dongsik

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4818307

Reference20 articles.

1. Removal of small particles on silicon wafer by laser-induced airborne plasma shock waves

2. J. M. Lee, S. H. Cho, J. G. Park, S. H. Lee, Y. P. Han, and S. Y. Kim, in Proceedings of the 3rd International Symposium on Laser Precision Microfabrication (2002), p. 287.

3. Nanoparticle removal from substrates with pulsed-laser induced plasma and shock waves

4. Pressure amplification of laser induced plasma shockwaves with shock tubes for nanoparticle removal

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