Author:
Mandai S.,Hoshi Y.,Kohno Y.
Cited by
3 articles.
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1. Development of compact synchrotron light source LUNA for x‐ray lithography;Review of Scientific Instruments;1992-01
2. Electron storage rings as X‐ray lithography sources: An update;Synchrotron Radiation News;1990-11
3. Survey of compact storage rings in Japan;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1990-05