Pulse stretcher with two beamsplitting elements for excimer laser pulses-Reference-Cited by-同舟云学术

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Pulse stretcher with two beamsplitting elements for excimer laser pulses

Published:2017-12 Issue:12 Volume:88 Page:123113
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Wang Qiang¹^ORCID,Han Yanling¹,Liu Cunding¹²,Li Bincheng¹³

Affiliation:

1. Institute of Optics and Electronics, Chinese Academy of Sciences, Shuangliu, Chengdu 610209, China

2. Graduate University of Chinese Academy of Sciences, Beijing 100049, China

3. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5005123

Reference15 articles.

1. Optical performance of laser light source for ArF immersion double patterning lithography tool

2. Excimer Lasers for Microlithography

3. Single-pulse, simultaneous multipoint multispecies Raman measurements in turbulent nonpremixed jet flames

4. Local fuel concentration measurements for mixture formation diagnostics using diffraction by laser-induced gratings in comparison to spontaneous Raman scattering

5. Application of an optical pulse stretcher to coherent anti-Stokes Raman spectroscopy

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