Experimental diagnosis of electron density and temperature in capacitively coupled argon plasmas: Triple-frequency discharges and two-dimensional spatial distributions-Reference-Cited by-同舟云学术

Experimental diagnosis of electron density and temperature in capacitively coupled argon plasmas: Triple-frequency discharges and two-dimensional spatial distributions

Published:2021-09 Issue:9 Volume:28 Page:093501
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Wu Jidun¹,Zheng Hao¹,Wang Yanfei¹,Cao Qilu¹,Zhou Fengzhu¹,Zhang Jiaojiao¹,Huang Xiaojiang¹²³^ORCID

Affiliation:

1. College of Science, Donghua University, Shanghai 201620, China

2. Member of Magnetic Confinement Fusion Research Centre, Ministry of Education of China, Shanghai 201620, China

3. Textiles Key Laboratory for Advanced Plasma Technology and Application, Shanghai 201620, China

Funder

Fundamental Research Funds for the Central Universities

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0044844

Reference55 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Physics of Radio-Frequency Plasmas

3. Characterization of argon/air atmospheric pressure capacitively coupled radio frequency dielectric barrier discharge regarding parasitic capacitor at 13.56 MHz

4. Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices

5. Modeling of dual frequency capacitively coupled plasma sources utilizing a full-wave Maxwell solver: I. Scaling with high frequency

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