Raman spectroscopy mapping of Si (001) surface strain induced by Ni patterned micro arrays-Reference-Cited by-同舟云学术

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Raman spectroscopy mapping of Si (001) surface strain induced by Ni patterned micro arrays

Published:2017-09-28 Issue:12 Volume:122 Page:125703
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Rodríguez-Aranda F. J.¹,Méndez-Lozoya J.¹,González F. J.¹^ORCID,Rodríguez A. G.¹^ORCID

Affiliation:

1. Coordinación para la Innovación y la Aplicación de la Ciencia y la Tecnología (CIACYT), Universidad Autónoma de San Luis Potosí (UASLP), Álvaro Obregón 64, 78000 San Luis Potosí, S.L.P., Mexico

Funder

Consejo Nacional de Ciencia y Tecnología (CONACYT)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4985817

Reference35 articles.

1. Electron beam lithography

2. Ultrafine luminescent structures through nanoparticle self-assembly

3. Imprint of sub‐25 nm vias and trenches in polymers

4. ION BEAM LITHOGRAPHY AND NANOFABRICATION: A REVIEW

5. Electron lithography for the fabrication of microelectronic devices

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