Ultraviolet reflectance of AlN, diamond‐like carbon, and SiC thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.103543
Reference9 articles.
1. Plasma CVD of Amorphous AlN from Metalorganic Al Source and Properties of the Deposited Films
2. RF plasma synthesis of amorphous AIN powder and films
3. Low-Pressure, Metastable Growth of Diamond and "Diamondlike" Phases
4. Amorphous silicon carbide coatings for extreme ultraviolet optics
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2. Excimer laser ablation of aluminum nitride;Journal of Materials Research;1997-01
3. Effect of UV irradiation of the film during plasma chemical vapour deposition;Thin Solid Films;1992-09
4. Absorption coefficient of β–SiC grown by chemical vapor deposition;Journal of Materials Research;1992-03
5. Fabrication and Electrical Properties of β-SiC/Si and Poly-SiC/Si Solar Cells;Springer Proceedings in Physics;1992
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