Possible origin for (110)-oriented growth of grains in hydrogenated microcrystalline silicon films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.118195
Reference10 articles.
1. Growth and Physical Properties of LPCVD Polycrystalline Silicon Films
2. Wide-Rrange Control of Crystallite Size and Its Orientation in Glow-Discharge Deposited µc-Si:H
3. Structure and crystal growth of atmospheric and low‐pressure chemical‐vapor‐deposited silicon films
4. Control of silicon network structure in plasma deposition
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