Magnetized retarding field energy analyzer measuring the particle flux and ion energy distribution of both positive and negative ions-Reference-Cited by-同舟云学术

Magnetized retarding field energy analyzer measuring the particle flux and ion energy distribution of both positive and negative ions

Published:2015-05 Issue:5 Volume:86 Page:053302
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Rafalskyi Dmytro¹,Dudin Stanislav²,Aanesland Ane¹

Affiliation:

1. Laboratoire de Physique des Plasmas (CNRS, Ecole Polytechnique, Sorbonne Universités, UPMC Univ Paris 06, Univ Paris-Sud), Ecole Polytechnique, 91128 Palaiseau, France

2. Department of Physics and Technology, V.N. Karazin Kharkiv National University, 61022 Kharkiv, Ukraine

Funder

European Commission (EC)

Agence Nationale de la Recherche (L' Agence Nationale de la Recherche)

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4919730

Reference43 articles.

1. Broad‐beam ion sources: Present status and future directions

2. The Physics and Technology of Ion Sources

3. Fundamentals and applications of ion–ion plasmas

4. Thin film deposition using low‐energy ion beams. I. System specification and design

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