Thickness dependence of the dielectric constant and resistance of Al2O3films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.323603
Reference8 articles.
1. Deposition and Properties of Aluminum Oxide Obtained by Pyrolytic Decomposition of an Aluminum Alkoxide
2. Radiation resistance of Al2O3MOS devices
3. High‐field transport properties of aluminum‐embedded aluminum oxide films
4. Metallic aluminum particle concentration in aluminum oxide thin films
5. Electrical Properties of Evaporated Aluminum Oxide Films
Cited by 62 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Dissimilar metal joints on macro- and micro scales: Impact on PEO processing-A review;Journal of Materials Science & Technology;2025-03
2. Optical properties of popular dielectric substrate materials in a wide spectral range from far-infrared to ultraviolet;Current Applied Physics;2024-11
3. Electronic properties and formation energy of chalcogen-doped (S/Se/Te) corundum Al2O3;Journal of Applied Physics;2024-08-01
4. Probing electronic and dielectric properties of ultrathin Ga2O3/Al2O3 atomic layer stacks made with in vacuo atomic layer deposition;Journal of Applied Physics;2024-07-10
5. Holistic Characterization of MgO-Al2O3, MgO-CaZrO3, and Y2O3-ZrO2 Ceramic Composites for Aerospace Propulsion Systems;Ceramics;2024-03-02
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3