Characterization of sputtered barium strontium titanate and strontium titanate-thin films-Reference-Cited by-同舟云学术

Characterization of sputtered barium strontium titanate and strontium titanate-thin films

Published:1997-09 Issue:5 Volume:82 Page:2558-2566
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Baumert B. A.,Chang L.-H.,Matsuda A. T.,Tsai T.-L.,Tracy C. J.,Gregory R. B.,Fejes P. L.,Cave N. G.,Chen W.,Taylor D. J.,Otsuki T.,Fujii E.,Hayashi S.,Suu K.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.366066

Reference34 articles.

1. Si LSI Process Technology for Integrating Ferroelectric Capacitors

2. Dielectric properties of ferroelectric thin films in the frequency range of mHz-GHz

3. Direct current conduction properties of sputtered Pt/(Ba0.7Sr0.3)TiO3/Pt thin films capacitors

4. Surface Morphologies and Electrical Properties of(Ba,Sr)TiO3Films Prepared by Two-Step Deposition of Liquid Source Chemical Vapor Deposition

5. RuO2/TiN-Based Storage Electrodes for(Ba,Sr)TiO3Dynamic Random Access Memory Capacitors

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