The origin of internal stress in low−voltage sputtered tungsten films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.322250
Reference12 articles.
1. Effect of Stress on the Physical Properties of Thin Films
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4. One-dimensional dislocations. I. Static theory
5. Stress Annealing in Vacuum Deposited Copper Films
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