Nucleation and growth kinetics of preferred C54 TiSi2 orientations: time-resolved x-ray diffraction measurements
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1512687
Reference13 articles.
1. The C49 to C54 Phase Transformation in TiSi2 Thin Films
2. Mechanisms for Enhanced Formation of the C54 Phase of Titanium Silicide Ultra-Large-Scale Integration Contacts
3. Kinetic mechanisms of theC49-to-C54 polymorphic transformation in titanium disilicide thin films: A microstructure-scaled nucleation-mode transition
4. Kinetics of the C49-C54 transformation in patterned and blanket TiSi2 films: a comparison.
5. Crystallographic texture of C54 titanium disilicide as a function of deep submicron structure geometry
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