Enhanced Hydrogen Pumping with Sputter‐Ion Pumps
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1717186
Reference1 articles.
1. Electronic Ultra‐High Vacuum Pump
Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Sputter-ion pumping;Capture Pumping Technology;2001
2. Pumps for Ultra-High Vacuum Applications;Handbook of Vacuum Science and Technology;1998
3. Pumping of helium and hydrogen by sputter‐ion pumps. II. Hydrogen pumping;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-05
4. Improvements in the Vacuum System of a VDG Accelerator Used for Clean Ion Implantation;Ion Implantation: Equipment and Techniques;1983
5. DC diode sputtering of titanium: determination of optimal deposition conditions by electrical and spectroscopic investigations;Journal of Physics D: Applied Physics;1976-08-21
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