Substrate dependent internal stress in sputtered zinc oxide thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350815
Reference15 articles.
1. dc triode sputtered zinc oxide surface elastic wave transducers
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4. Cadmium Sulphide and Zinc Oxide Thin-Film Transducers
5. PREPARATION OF ZnO THIN FILMS BY SPUTTERING OF THE COMPOUND IN OXYGEN AND ARGON
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