Comprehensive modeling of Joule heated cantilever probes-Reference-Cited by-同舟云学术

Comprehensive modeling of Joule heated cantilever probes

Published:2017-05-07 Issue:17 Volume:121 Page:174503
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Spieser M.¹,Rawlings C.²,Lörtscher E.²,Duerig U.²^ORCID,Knoll A. W.²^ORCID

Affiliation:

1. SwissLitho AG, 8805 Zürich, Switzerland

2. IBM Research-Zurich, 8803 Rüschlikon, Switzerland

Funder

European Commission (EC)

H2020 European Research Council (ERC)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4981883

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4. Low‐stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope

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