Resonance enhanced multiphonon ionization of silicon produced during disilane pyrolysis
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.357497
Reference17 articles.
1. A Mathematical Model of the Fluid Mechanics and Gas‐Phase Chemistry in a Rotating Disk Chemical Vapor Deposition Reactor
2. Rice-Ramsperger-Kassel-Marcus theoretical prediction of high-pressure Arrhenius parameters by nonlinear regression: application to silane and disilane decomposition
3. Silicon deposited by low pressure chemical vapour deposition from Si2H6: experiments, modelling and properties
4. Chemical Vapor Deposition of Hydrogenated Amorphous Silicon from Disilane
5. The decomposition kinetics of disilane and the heat of formation of silylene
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1. Reaction kinetics in silicon chemical vapor deposition;Current Opinion in Solid State and Materials Science;2002-10
2. Isotopically Selective Infrared Multiphoton Dissociation of Vibrationally Excited SiH4;The Journal of Physical Chemistry A;2002-05-01
3. Formation Mechanism of Hydrogenated Silicon Clusters during Thermal Decomposition of Disilane;The Journal of Physical Chemistry B;2001-12-20
4. VUV photoionization time-of-flight mass spectrometry of flash pyrolysis of silane and disilane;Chemical Physics Letters;2001-08
5. Diagnostics of the gas-phase thermal decomposition of Si2H6 using vacuum ultraviolet photoionization;Chemical Physics Letters;2000-03
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