1. Federal State Institution, Scientific Research Institute for System Analysis of the Russian Academy of Sciences, Nakhimovskiy pr., 36-1, 117218 Moscow, Russia
2. Institute of Microelectronics Technology and High-Purity Materials Russian Academy of Sciences, Chernogolovka, 142432 Moscow District, Russia
3. Helmholtz-Zentrum Dresden-Rossendorf, 01328 Dresden, Germany