Use of plasma treatment to grow carbon nanotube forests on TiN substrate-Reference-Cited by-同舟云学术

Use of plasma treatment to grow carbon nanotube forests on TiN substrate

Published:2011-06 Issue:11 Volume:109 Page:114312
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Esconjauregui S.,Bayer B. C.,Fouquet M.,Wirth C. T.,Yan F.,Xie R.,Ducati C.,Baehtz C.,Castellarin-Cudia C.,Bhardwaj S.,Cepek C.,Hofmann S.,Robertson J.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.3587234

Reference39 articles.

1. Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties

2. Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition

3. Simultaneous Formation of Multiwall Carbon Nanotubes and their End-Bonded Ohmic Contacts to Ti Electrodes for Future ULSI Interconnects

4. Growth and characterization of high-density mats of single-walled carbon nanotubes for interconnects

5. Use of carbon nanotubes for VLSI interconnects

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