1. Russian Quantum Center, Skolkovo, Moscow Region 143025, Russia
2. Lomonosov Moscow State University, Leninskie Gory, Moscow 119992, Russia
3. Institute of Radioengineering and Electronics, Mokhovaya 11-7, Moscow 125009, Russia
4. Prokhorov General Physics Institute RAS, Vavilov 38, Moscow 119991, Russia
5. Vernadsky Crimean Federal University, Vernadsky Ave. 4, Simferopol 295007, Russia
6. Moscow Institute of Physics and Technology, Moscow Region 141700, Russia