A high‐speed Si lateral photodetector fabricated over an etched interdigital mesa
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91723
Reference5 articles.
1. Photodetectors for optical communication systems
2. Annealing characteristics of highly P+‐ion‐implanted silicon crystal—two‐step anneal
3. A proposed new high-speed optical detector
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Optical Interconnections;The Kluwer International Series in Engineering and Computer Science;1989
2. Chapter 5 Phototransistors for Lightwave Communications;Semiconductors and Semimetals;1985
3. Metal/tunnel‐barrier/semiconductor/tunnel‐barrier/metal fast photodetector;Applied Physics Letters;1982-02
4. Novel High Speed Silicon Photodetector With Tunnel-barrier Layers.;Topical Meeting on Integrated and Guided-Wave Optics;1982
5. Characteristics of an avalanche phototransistor fabricated on a Si surface;Applied Physics Letters;1981-07-15
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