Single target sputtering of superconducting YBa2Cu3O7−δthin films on Si (100)
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.101557
Reference17 articles.
1. Sputter deposition of YBa2Cu3O7−ythin films
2. Epitaxial Y‐Ba‐Cu‐O thin films prepared by rf‐magnetron sputtering
3. Epitaxial Growth of Ba2YCu3OxThin Film on Epitaxial ZrO2/Si(100)
4. Preparation and substrate reactions of superconducting Y‐Ba‐Cu‐O films
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