A very compact electron cyclotron resonance ion source
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1145075
Reference3 articles.
1. Effects of permanent magnet arrangements and antenna locations on the generation of multicusp electron cyclotron resonance plasma
2. ECR ion and free radical sources for MBE applications
3. Reentrant cavity as a low‐power plasma source
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