1. Guangdong Provincial Key Laboratory of Chip and Integration Technology, School of Semiconductor Science and Technology, South China Normal University 1 , Foshan 528225, Guangdong, People's Republic of China
2. Guangdong Provincial Key Laboratory of Information Photonics Technology, School of Materials and Energy, Guangdong University of Technology 2 , Guangzhou 510006, Guangdong, People's Republic of China