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Dimpled electrostatic MEMS actuators

Published:2019-01-14 Issue:2 Volume:125 Page:024304
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Alneamy A.¹²^ORCID,Al-Ghamdi M.³,Park S.⁴^ORCID,Khater M.⁵,Abdel-Rahman E.¹^ORCID,Heppler G.¹

Affiliation:

1. Department of Systems Design Engineering, University of Waterloo, Waterloo, Ontario, Canada

2. Department of Mechanical Engineering, Jazan University, Jazan, Saudi Arabia

3. Research Program of Electronics, Communications, and Photonics, KACST, Riyadh, Saudi Arabia

4. Thalmic Labs Inc., Kitchener, Canada

5. Department of Mechanical Engineering, KFUPM, Dhahran, Saudi Arabia

Funder

King Fahd University of Petroleum and Minerals

King Abdulaziz City for Science and Technology

CMC Microsystems

Jazan University

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5053597

Reference24 articles.

1. Review on the Modeling of Electrostatic MEMS

2. Dual actuation micro-mirrors

3. MEMS Linear and Nonlinear Statics and Dynamics

4. Electrostatic pull-in instability in MEMS/NEMS: A review

5. Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion;Journal of Microelectromechanical Systems;2022-10

2. Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications;Micromachines;2022-08-04

3. Fabrication of Comb-Structured Acceleration Sensors by Roll-to-Roll Gravure Printing;International Journal of Precision Engineering and Manufacturing-Green Technology;2021-05-10

4. Bifurcation analysis of the levitation force MEMS actuators;International Journal of Mechanical Sciences;2020-07

5. A resonant pressure MEMS sensor based on levitation force excitation detection;Nonlinear Dynamics;2020-03-28

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