Fabrication and analysis of InAlN/GaN metal–insulator–semiconductor high-electron-mobility transistors based on AlN/GaN superlattice channel
Author:
Affiliation:
1. The National Institute of Advanced Industrial Science and Technology (AIST), Ibaraki 305-8560, Japan
Funder
New Energy and Industrial Technology Development Organization
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0064935
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. GaN-based power high-electron-mobility transistors on Si substrates: from materials to devices;Semiconductor Science and Technology;2023-04-25
2. Calculation of Thermal Conductivity of AlGaN/GaN Superlattices;physica status solidi (b);2023-04-24
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