Investigation of a steady-state cylindrical magnetron discharge for plasma immersion treatment
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1590054
Reference17 articles.
1. Processing considerations with plasma immersion ion implantation
2. Effects of plasma immersion ion implantation of oxygen on mechanical properties and microstructure of Ti6Al4V
3. Surface improvements of industrial components treated by plasma immersion ion implantation (PIII): results and prospects
4. Novel metal ion surface modification technique
5. Some fundamental problems in low-energy ion implantation
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