Si deposition by electron beam induced surface reaction
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.100465
Reference7 articles.
1. New selective deposition technology by electron-beam induced surface reaction
2. Electron‐beam fabrication of 80‐Å metal structures
3. Photodeposition of metal films with ultraviolet laser light
4. A simple model for the dependence of Auger intensities on specimen thickness
5. Quantitative Auger electron spectroscopy and electron ranges
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