Electrohydrodynamic direct-writing lithography: An alternative maskless technique for microstructure fabrication
Author:
Affiliation:
1. State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
Funder
The Fundamental Research Funds for the Central Universities
National Natural Science Foundation of China (NSFC)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4905151
Reference23 articles.
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