Terahertz characterization of nano-scale high-entropy alloy films and their high-contrast grating applications

Author:

Lu Chia-Yen1ORCID,Sung Yi-Chen1,Yeh Cheng-Hsien2ORCID,Chen Yu-Hua1,Kuan Chen-Yun3,Hung Kuang-Teng2,Chen Wei-Hsiang1,Hsu Wen-Dung34ORCID,Shih Chuan-Feng24ORCID,Yang Chan-Shan1456ORCID

Affiliation:

1. Institute and Undergraduate Program of Electro-Optical Engineering, National Taiwan Normal University 1 , Taipei 11677, Taiwan

2. Department of Electrical Engineering, National Cheng Kung University 2 , Tainan 70101, Taiwan

3. Department of Materials Science and Engineering, National Cheng Kung University 3 , Tainan 70101, Taiwan

4. Applied High Entropy Technology (AHET) Center, National Cheng Kung University 4 , Tainan 70101, Taiwan

5. Micro/Nano Device Inspection and Research Center, National Taiwan Normal University 5 , Taipei 10610, Taiwan

6. Heterogeneously-integrated Silicon Photonic Integration Center (HiSiPIC), Ministry of Education 6 , Taipei 106335, Taiwan

Abstract

We investigated the optical constants of thin films of the Nb25Mo25Ta25W25 alloy, which belongs to high-entropy alloys (HEAs), with a transmission terahertz (THz) measurement system and discovered that the refractive index, extinction coefficient, and conductivity of the HEA thin film measured in the range of 0.3–1.0 THz all increased as the thickness of the thin film increased (the thickness was maintained in the range between 10 and 40 nm). According to the experimental results, this alloy with a high refractive index is suitable for producing high-contrast gratings (HCGs). The principle behind achieving a high contrast with a high-reflection HEA grating is to harness the confined plasmonic energy within the grating, thereby enhancing the localized plasmonic energy within the grating. This work elucidates that we can not only fabricate THz components by controlling the thickness of the thin film but also utilize the high refractive index of this material to create HCGs.

Funder

National Science and Technology Council

Publisher

AIP Publishing

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