On the radial distribution and nonambipolarity of charged particle fluxes in a nonmagnetized planar inductively coupled plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.363786
Reference35 articles.
1. Novel radio‐frequency induction plasma processing techniques
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4. Application of a high density inductively coupled plasma reactor to polysilicon etching
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